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八氟丙烷

Octafluoropropane


产品介绍 Product introduction

        八氟丙烷(C3F8)是一种无色、无味、不可燃的惰性气体。八氟丙烷熔点为-183.0℃，沸点为-36.7℃，难溶于水。电子级高纯八氟丙烷应用在半导体器件制造过程中，与氧气的混合气可用作等离子蚀刻气体。
Octafluoropropane (C3F8) is a kind of colorless, odorless, non-flammable inert gas. Its melting point is 183.0 ℃, boiling point is 36.7 ℃, poorly soluble in water. Electronic grade octafluoropropane is used in semiconductor materials and semiconductor device manufacturing. The mixture of octafluoropropane and oxygen is used as plasma etching material, which can selectively interact with the metal matrix of silicon wafer.

产品指标 Quality specification

项目 Items 单位 Unit 指标 Indexs
C3F8 Vol.% ≥99.999 ≥99.9995
O2+Ar Vol.ppm ＜1 ＜0.5
N2 Vol.ppm ＜5 ＜1
CO Vol.ppm ＜0.5 ＜0.5
CO2 Vol.ppm ＜0.5 ＜0.5
CF4 Vol.ppm ＜0.5 ＜0.5
C2F6 Vol.ppm ＜0.5 ＜0.5
CH4 Vol.ppm ＜1 ＜1
H2O Vol.ppm ＜1 ＜1
酸度Acidity (Mesured by HF) Wt. ppm ＜0.1 ＜0.1
总杂质含量 
Total impurity content		 Mol.ppm ≤10 ≤5

产品用途 Application

        在半导体工业中，八氟丙烷用作等离子蚀刻材料；在医学中，八氟丙烷可用于玻璃体视网膜手术后填充物及超声造影剂；八氟丙烷还可用于制作制冷混合物。        
In the semiconductor industry, octafluoropropane is used as plasma etching materials; In medicine, octafluoropropane can be used as a filler and contrast agent after vitreoretinal surgery. Octafluoropropane is also used as an ingredient in refrigerating mixtures.

包装、贮存 Packaging and storage

        八氟丙烷充装在经特殊处理的洁净、干燥的无缝高压气瓶中，气瓶容积分别为4L、8L、10L、12.5L、40L等。具体包装规格可根据用户需求定制更改。           
Octafluoropropane is filled in clean and dry seamless cylinders with special treatment. The cylinder volumes are 4L, 8L, 10L, 12.5L and 40L etc. Packaging specifications can be customized according to customers' requirements.  

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