产品介绍 Product introduction
乙硼11烷，又称六氢化二硼、硼乙烷，分子式为B2H6，相对分子量为27.67。乙硼烷在正常条件下（15℃，101.325kPa）是一种无色、易燃、易分解、具有令人恶心的烟火气味和微甜味道的高毒气体。乙硼烷是一种非常活泼的化合物，常温下就不很稳定，会缓慢地分解生成各种不同含量的硼氢化合物，同时会放出氢气。乙硼烷遇水立即水解，最终得到硼酸和大量的氢气。乙硼11烷在电子工业中作为气态杂质源、离子注入和硼掺杂氧化扩散的掺杂剂使用。
Diborane has a molecular formula of B2H6 and a relative molecular weight of 27.67. Diborane is a kind of colorless, flammable, labile and high toxic gas with disgusting fireworks smell and sweet taste at normal conditions (15℃, 101.325kPa). Diborane is a very reactive compound that is unstable at room temperature and decomposes slowly to form a variety of borohydrides in different contents, hydrogen is generated at same time. Diborane hydrolyzes immediately encountering with water, generating boric acid and a large amount of hydrogen. Diborane11 is used as dopant for gaseous impurity source, ion implantation and boron doped oxide diffusion in the electronic industry.
产品用途 Application
乙硼11烷可在微电子、平板显示、太阳能电池、LED、光纤、医药、核电等领域应用，也可用作聚合催化剂。乙硼11烷在半导体制造中用作硅材料的p型掺杂源，用于半导体生产，硅和锗的外延生长、钝化、扩散和离子注入。
Diborane can be used in microelectronics, flat panel display, solar cells, LED, optical fiber, medicine, nuclear power and other fields, also can be used as polymerization catalyst. Diborane11 is a p-doped source of silicon used in semiconductor manufacturing, epitaxial growth, passivation, diffusion, and ion implantation of silicon and germanium.
包装、贮存 Packaging and storage
乙硼11烷存放于不锈钢钢瓶中，在室温条件下，钢瓶内纯乙硼11烷每月要分解10%~20%，在低温下乙硼11烷可以贮存几个月且分解速度低得多，但乙硼11烷储存温度不应低于-80℃。储存区应远离明火、火花、热源，并应备有泄漏应急处理设备。
Diborane11 is stored in stainless steel cylinders, pure diborane11 in the cylinder decomposes 10%~20% a month at room temperature, diborane11 can be stored a few months and the decomposition rate is much lower in low temperature, but storage temperature of diborane11 should not be lower than -80℃. Storage area shall be away from open flame, spark and heat source, and shall be equipped with equipment for emergency.
